The VTF-PECVD-1200 vertical single temperature PECVD system consists of a VTL-VTF1200 vacuum vertical tube furnace, a quartz vacuum chamberComposed of RF power supply, GX gas supply system, exhaust system, and vacuum measurement system.

Main features:

1. Convert the gas inside the quartz vacuum chamber into an ionic state through an RF power supply.

2. PECVD requires lower temperatures for chemical vapor deposition compared to conventional CVD.

3. The stress level of the deposited film can be controlled by the frequency of the RF power supply.

4. PECVD has a higher chemical vapor deposition rate, better uniformity, consistency, and stability than ordinary CVD.

5. Widely used in the growth of various thin films, such as SiOx, SiNx, SiOxNy, and amorphous silicon (a-Si: H).

The VTF1200-PECVD system uses Swedish Kanthal resistance wire as the heating element, adopts a double-layer shell structure, and 30 segment programmed temperature controlinstrumentTable, phase-shifting trigger, thyristor control, furnace made of alumina polycrystalline fiber material, both ends of the furnace tube can be sealed with stainless steel flangesSealed, the stainless steel flange is equipped with air nozzles, valves, and pressure gauges. When vacuuming, the vacuum degree can reach 10-3 Pa and has a temperature fieldAdvantages include balance, low surface temperature, fast temperature rise and fall rate, energy saving, and favorable price.

(3) Good resistance balance and temperature field balance

(4) Heating element: Kanthal A1 imported resistance wire from Sweden (resistance wire can be guaranteed for 2 years)

When the circuit experiences overcurrent or leakage, the circuit will automatically disconnect

The furnace is equipped with communication interfaces and software, which can directly control various parameters of the furnace through a computer, and observe the PV and SV temperature values and instrument operation on the furnace from the computer. The actual heating curve of the furnace will be drawn in real time by the computer, and the temperature data at each moment can be saved, and the vacuum degree can be adjusted at any time.

(2) Adopting Japanese technology for molding.

(3) The spacing and pitch of the resistance wires in the furnace are all arranged according to the best thermal technology in Japan, and the temperature field is simulated through thermal software

(4) Using 4-week heating, the temperature field is more balanced

(All imported electrical appliances certified by UL)